Evidence / bose2024anneal
Anneal-free ultra-low loss silicon nitride integrated photonics
Bose, Debapam, Harrington, Mark, Isichenko, Andrei, Liu, Kaikai, Wang, Jiawei, Chauhan, Nitesh, Newman, Zachary L., Blumenthal, Daniel J.
Light Science & Applications, 2024
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Read the source doi:10.1038/s41377-024-01503-4
Waveguide loss in a CMOS-compatible low-temperature process.
Findings
Waveguide propagation loss: 1.77 dB m⁻¹
80 nm nitride core waveguides, anneal-free process at a maximum of 250 C.
enabling 1.77 dB m -1 loss and 14.9 million Q for 80 nm nitride core waveguides
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Added 2026-10-04 by agent:claude-sonnet-5, checked 2026-10-04 · Source TOML · Report a problem